Analysis on the tolerance of continuous phase plate

Chunlin Yang; Yuanhang Zhang; Jian Wan; Liming Yang

doi:10.1117/12.970526

15 October 2012 Analysis on the tolerance of continuous phase plate

Chunlin Yang, Yuanhang Zhang, Jian Wan, Liming Yang

Proceedings Volume 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing; 84201J (2012) https://doi.org/10.1117/12.970526
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

To realize the smoothing character of continuous phase plate the tolerance capability of this kind element is analyzed in this paper. A series of wavefront with different aberrant parameters are simulated and the far-field distributions of these wavefront are calculated. The results show that with the varying of the distortion depth of the aberrant wavefront, the distribution of the far-field faculas are calculated. To analyze the tolerance of continuous phase plate, the rms values of the far-field faculas about the aberrant wavefront are calculated.

Citation Download Citation

Chunlin Yang, Yuanhang Zhang, Jian Wan, and Liming Yang "Analysis on the tolerance of continuous phase plate", Proc. SPIE 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing, 84201J (15 October 2012); https://doi.org/10.1117/12.970526

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