Holographic exposure of subwavelength circular gratings using a cone based interferogram

Jean Sauvage-Vincent; Svetlen Tonchev; Yves Jourlin; Olivier Parriaux

doi:10.1117/12.921863

10 May 2012 Holographic exposure of subwavelength circular gratings using a cone based interferogram

Jean Sauvage-Vincent, Svetlen Tonchev, Yves Jourlin, Olivier Parriaux

Proceedings Volume 8428, Micro-Optics 2012; 84280D (2012) https://doi.org/10.1117/12.921863
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

Fabrication of circular gratings formed of radially periodic circular lines is presented. It is a very simple fringes projection set-up based on holistic printing method using a axicon to generate the self-interferogramm of a Bessel beam using a transmissive cone. The new holographic optical interference scheme has been designed to produce circular lines based interferogram from a azimuthally polarized beam. The angle of the cone is adapted to cover a restricted periods range. The principle of the method is described and applied to the fabrication of a radial polarizer of sub-micron period.

Citation Download Citation

Jean Sauvage-Vincent, Svetlen Tonchev, Yves Jourlin, and Olivier Parriaux "Holographic exposure of subwavelength circular gratings using a cone based interferogram", Proc. SPIE 8428, Micro-Optics 2012, 84280D (10 May 2012); https://doi.org/10.1117/12.921863

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