Design, fabrication, characterization of a polymeric nano-precision micro z-stage

M. Ghaderi; F. Beygi Azar Aghbolagh; M. Taghavi; I. Sabri; M. Sadegh; H. Latifi

doi:10.1117/12.922049

8 May 2012 Design, fabrication, characterization of a polymeric nano-precision micro z-stage

M. Ghaderi, F. Beygi Azar Aghbolagh, M. Taghavi, I. Sabri, M. Sadegh, H. Latifi

Proceedings Volume 8428, Micro-Optics 2012; 84281I (2012) https://doi.org/10.1117/12.922049
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

Many applications in micro and nanotechnologies require micron-sized components, capable of positioning in ranges of sub-micrometers to a few microns. This paper reports on the design, fabrication and characterization procedure of an electrostatically actuated polymeric Nano-precision micro z-stage. Due to its ease of fabrication and great variety of functionalities, polymers have become an important material in micro fabrication technology. In contrast to piezoelectric stages, polymeric micro stage has a comparatively simple and cost effective fabrication procedure. Furthermore, low Young's Modulus of polymers made them a suitable basic material in comparison with their traditional counterparts. In this paper, SU-8 photoresist was used as the construction material and the photolithography technique were used to realize the stage. SU-8 with its low Young's modulus (5 GPa), has a higher tendency for bending, compared to, for example, silicon nitride (150-350 GPa). These properties make the SU-8 polymer, suitable for various applications.

Citation Download Citation

M. Ghaderi, F. Beygi Azar Aghbolagh, M. Taghavi, I. Sabri, M. Sadegh, and H. Latifi "Design, fabrication, characterization of a polymeric nano-precision micro z-stage", Proc. SPIE 8428, Micro-Optics 2012, 84281I (8 May 2012); https://doi.org/10.1117/12.922049

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KEYWORDS

Polymers

Copper

Electrodes

Photomasks

Lithography

Nanolithography

Optical lithography

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