Improvement of least squares integration method with iterative compensation for shape reconstruction from gradient

Lei Huang; Anand Asundi

doi:10.1117/12.921402

27 April 2012 Improvement of least squares integration method with iterative compensation for shape reconstruction from gradient

Lei Huang, Anand Asundi

Author Affiliations +

Proceedings Volume 8430, Optical Micro- and Nanometrology IV; 84300S (2012) https://doi.org/10.1117/12.921402
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

An improvement is made to the traditional 2D integration with least squares method by introducing an iterative compensation procedure. The issue of inaccurate reconstruction due to imperfection of Southwell grid model is solved through the introduced iterative compensations. The feasibility and superiority of the proposed method are investigated with simulations. Moreover, the proposed method is compared with the integration method with radial basis functions.

Citation Download Citation

Lei Huang and Anand Asundi "Improvement of least squares integration method with iterative compensation for shape reconstruction from gradient", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300S (27 April 2012); https://doi.org/10.1117/12.921402

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