Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform

Peter Verheyen; Guy Lepage; Joris Van Campenhout; Marianna Pantouvaki; Philippe Absil; Peter De Heyn; Wim Bogaerts; Pieter Dumon; Shankar Selvaraja

doi:10.1117/12.921747

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10 May 2012 Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform

Peter Verheyen, Guy Lepage, Joris Van Campenhout, Marianna Pantouvaki, Philippe Absil, Peter De Heyn, Wim Bogaerts, Pieter Dumon, Shankar Selvaraja

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Proceedings Volume 8431, Silicon Photonics and Photonic Integrated Circuits III; 843114 (2012) https://doi.org/10.1117/12.921747
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow.

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Peter Verheyen, Guy Lepage, Joris Van Campenhout, Marianna Pantouvaki, Philippe Absil, Peter De Heyn, Wim Bogaerts, Pieter Dumon, and Shankar Selvaraja "Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843114 (10 May 2012); https://doi.org/10.1117/12.921747

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