Loss free mask production with inspection, repair, and pellicle handling systems

Makoto Yonezawa; Tosho Cho; Makoto Takano; Masahiro Toriguchi; Masafumi Shinoda; Mitsuru Hamakawa; Seiki Matsumoto

doi:10.1117/12.970391

29 June 2012 Loss free mask production with inspection, repair, and pellicle handling systems

Makoto Yonezawa, Tosho Cho, Makoto Takano, Masahiro Toriguchi, Masafumi Shinoda, Mitsuru Hamakawa, Seiki Matsumoto

Proceedings Volume 8441, Photomask and Next-Generation Lithography Mask Technology XIX; 84410P (2012) https://doi.org/10.1117/12.970391
Event: Photomask and NGL Mask Technology XIX, 2012, Yokohama, Japan

Abstract

Un-repairable defects cause not only delivery delay but also un-negligible loss cost in Large Size Photo Mask (LSPM) Productions. In order to avoid such loss, Lasertec provides various types of inspection and repair systems. The Large Size Substrate inspection system LB79 works for qualifying substrates for LSPMs. In a LSPM maker, the resist coated blanks can be inspected with LIR79i, the In-process Inspection and Repair system. ADI (After Develop Inspection) also can be performed with the same LIR79i as well as Resist Pattern Repairs with the Laser shots and the ink dispensing.

Citation Download Citation

Makoto Yonezawa, Tosho Cho, Makoto Takano, Masahiro Toriguchi, Masafumi Shinoda, Mitsuru Hamakawa, and Seiki Matsumoto "Loss free mask production with inspection, repair, and pellicle handling systems", Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 84410P (29 June 2012); https://doi.org/10.1117/12.970391

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available