Translator Disclaimer
Paper
17 September 2012 Progress with MEMS x-ray micro pore optics
Author Affiliations +
Abstract
Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuichiro Ezoe, Teppei Moriyama, Tomohiro Ogawa, Takuya Kakiuchi, Takaya Ohashi, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, and Ryutaro Maeda "Progress with MEMS x-ray micro pore optics", Proc. SPIE 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, 84430U (17 September 2012); https://doi.org/10.1117/12.925811
PROCEEDINGS
11 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Making the ATHENA optics using silicon pore optics
Proceedings of SPIE (July 24 2014)
Silicon pore optics development for ATHENA
Proceedings of SPIE (September 04 2015)
The first light of a single stage MEMS x ray...
Proceedings of SPIE (October 03 2007)
Stacking of silicon pore optics for IXO
Proceedings of SPIE (August 31 2009)
Research and development of MEMS x-ray optics
Proceedings of SPIE (September 08 2005)
Development of x-ray optics for the XEUS Mission
Proceedings of SPIE (November 04 2004)

Back to Top