An imaging displacement sensor with nanometer accuracy

David Woody; David Redding

doi:10.1117/12.925231

13 September 2012 An imaging displacement sensor with nanometer accuracy

David Woody, David Redding

Proceedings Volume 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II; 84500U (2012) https://doi.org/10.1117/12.925231
Event: SPIE Astronomical Telescopes + Instrumentation, 2012, Amsterdam, Netherlands

Abstract

An imaging displacement sensor (IDS) has been developed that can measure the displacement with an accuracy of 30 nm in 0.03 s with the precision improving to 1 nm for averaging times of 100 s. The IDS consists simply of a light emitting diode (LED) pinhole collimator and a charge-coupled device (CCD) camera chip. The position accuracy is better than 0.05% over the few mm CCD size with deviation from linearity <140 nm. All six degrees of freedom (DoF), three translations and three angles, can be measured with the same accuracy by combining multiple IDS with different collimator beam orientations and knowing the nominal separation between the collimators and CCDs.

Citation Download Citation

David Woody and David Redding "An imaging displacement sensor with nanometer accuracy", Proc. SPIE 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II, 84500U (13 September 2012); https://doi.org/10.1117/12.925231

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