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19 October 2012 An analytical model for the opto-thermo-mechanical conversion mechanisms in a MOEMS-based energy harvester
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Abstract
The use of optical excitation in MEMS elements triggers several mechanisms that can be properly used for enhancing its mechanical response. This is particularly interesting when MEMS components are used as the transducer element on energy harvesting applications involving opto-mechanical conversion schemes. One of the pathways is based on the thermal response of the vibrating structures. In this contribution we have analyzed how a MEMS structure consisting on a clamped-clamped beam responds mechanically to the heating of the element. This heating is produced by the partial absorption of an incident radiation at the IR band. A thin metal layer evaporated on top of the suspended beam acts as the infrared light absorber. The gap forms an optical interferometer which couples the light absorption to the mechanical deflection of the CC-beam. This effect can be enhanced by a proper design of the whole mechanical geometry. Both, the optical absorbance and the energy conversion to the thermal domain of the MOEMS device are analyzed. Additionally, the transduction to the mechanical domain in the form of beam vibrations of the optical energy absorbed by the structure and transformed into heat is also modeled. This paper focus on the analytical model that is necessary to understand the involved physical mechanisms and the results obtained from the simulation of the device.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jordi Agusti, Alexander Cuadrado, Juan Carlos Martínez-Anton, Javier Alda, and Gabriel Abadal "An analytical model for the opto-thermo-mechanical conversion mechanisms in a MOEMS-based energy harvester", Proc. SPIE 8463, Nanoengineering: Fabrication, Properties, Optics, and Devices IX, 846313 (19 October 2012); https://doi.org/10.1117/12.934828
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