Paper
11 October 2012 Study on indium phosphide nanowires grown by metal organic chemical vapor deposition and coated with aluminum oxides deposited by atomic layer deposition
Andrew J. Lohn, Noel Dawson, Robert Cormia, David Fryauf, Junce Zhang, Kate J. Norris, Nobuhiko P. Kobayashi
Author Affiliations +
Abstract
Semiconducting nanowires are promising materials for a variety of applications, many of which are in optoelectronics where their ability to use quantum confinement to tune transition energy levels and their ability to epitaxially grow on substrates with large lattice-mismatches enable unique opportunities. In addition, the large relative surface area of nanowire-based devices can be either a benefit as in, for example, sensor applications or challenges such as charge trapping, non-radiative recombination or Fermi-level pinning. In this study, indium phosphide nanowires grown by metal organic chemical vapor deposition were conformally coated with aluminum oxide by atomic layer deposition as a means of controlling the surface states within the indium phosphide region. Photoluminescence spectra from the coated nanowires show a strong blueshift and slight peak broadening as compared to uncoated nanowires despite their increased lateral dimension. This degree of blueshift is unlikely to have been caused by strain associated with the coating because of its relatively thin thickness (~10 nm), and the x-ray diffraction profiles collected from the coated nanowires do not indicate the presence of substantial lattice deformation. It is more likely to be a result of altered chemical state at the surface; the uncoated nanowires have oxygen bound to both indium and phosphorus near the surface as confirmed in our X-ray photoelectron spectroscopy studies. Subsequent aluminum oxide deposition alters surface atomic bonding thereby modifying the states electronic responsible for optical properties in the nanowires.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew J. Lohn, Noel Dawson, Robert Cormia, David Fryauf, Junce Zhang, Kate J. Norris, and Nobuhiko P. Kobayashi "Study on indium phosphide nanowires grown by metal organic chemical vapor deposition and coated with aluminum oxides deposited by atomic layer deposition", Proc. SPIE 8467, Nanoepitaxy: Materials and Devices IV, 84670U (11 October 2012); https://doi.org/10.1117/12.930525
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KEYWORDS
Nanowires

Indium

Atomic layer deposition

Coating

Metalorganic chemical vapor deposition

Oxygen

Luminescence

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