Translator Disclaimer
15 October 2012 Development of a high-speed nanoprofiler using normal vector tracing
Author Affiliations +
A new high-speed nanoprofiler was developed in this study. This profiler measures normal vectors and their coordinates on the surface of a specimen. Each normal vector and coordinate is determined by making the incident light path and the reflected light path coincident using 5-axis controlled stages. This is ensured by output signal of quadrant photo diode (QPD). From the acquired normal vectors and their coordinates, the three-dimensional shape is calculated by a reconstruction algorithm based on least-squares. In this study, a concave spherical mirror with a 400 mm radius of curvature was measured. As a result, a peak of 30 nm PV was observed at the center of the mirror. Measurement repeatability was 1 nm. In addition, cross-comparison with a Fizeau interferometer was implemented and the results were consistent within 10 nm. In particular, the high spatial frequency profile was highly consistent, and any differences were considered to be caused by systematic errors.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Kitayama, H. Matsumura, K. Usuki, T. Kojima, J. Uchikoshi, Y. Higashi, and K. Endo "Development of a high-speed nanoprofiler using normal vector tracing", Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 85010A (15 October 2012);


Further improvements of digital interferometer
Proceedings of SPIE (August 18 2018)
Measurements of aspheric surfaces
Proceedings of SPIE (August 11 2008)
Metrological challenges of synchrotron radiation optics
Proceedings of SPIE (September 06 1999)
Absolute interferometric testing of cylindraical surfaces
Proceedings of SPIE (December 12 1994)
Testing large plane mirrors with the Ritchey Common test in...
Proceedings of SPIE (September 06 1999)

Back to Top