An active optics system for EUV/soft x-ray beam shaping

C. Svetina; D. Cocco; A. Di Cicco; C. Fava; S. Gerusina; R. Gobessi; N. Mahne; C. Masciovecchio; E. Principi; L. Raimondi; L. Rumiz; R. Sergo; G. Sostero; D. Spiga; M. Zangrando

doi:10.1117/12.929701

19 October 2012 An active optics system for EUV/soft x-ray beam shaping

C. Svetina, D. Cocco, A. Di Cicco, C. Fava, S. Gerusina, R. Gobessi, N. Mahne, C. Masciovecchio, E. Principi, L. Raimondi, L. Rumiz, R. Sergo, G. Sostero, D. Spiga, M. Zangrando

Author Affiliations +

Proceedings Volume 8503, Adaptive X-Ray Optics II; 850302 (2012) https://doi.org/10.1117/12.929701
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

FERMI@Elettra is a VUV/Soft X-ray Free Electron Laser (FEL) user facility under commissioning in Trieste, Italy. It provides a spatially coherent transform-limited photon beam in the sub-ps regime with high fluence and tunable wavelength. One of the FERMI beamlines, TIMEX, will be dedicated to the study of matter under extreme and metastable conditions, created and probed by the FEL radiation. Moreover, an active optics dedicated to perform the beam shaping at focus is needed in order to provide the necessary flat-top intensity distribution for heating the sample uniformly. In this work the principles of the beam shaping applied to the TIMEX beamline will be discussed as well as the adopted solution. Ray tracing simulations will be shown for theoretical mirror profiles as well as the metrological measurements with an interferometer and the Long Trace Profiler (LTP).

Citation Download Citation

C. Svetina, D. Cocco, A. Di Cicco, C. Fava, S. Gerusina, R. Gobessi, N. Mahne, C. Masciovecchio, E. Principi, L. Raimondi, L. Rumiz, R. Sergo, G. Sostero, D. Spiga, and M. Zangrando "An active optics system for EUV/soft x-ray beam shaping", Proc. SPIE 8503, Adaptive X-Ray Optics II, 850302 (19 October 2012); https://doi.org/10.1117/12.929701

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available