Vectorial shearing interferometer used in defocus detection

Guillermo García-Torales; Jorge Sánchez Preciado; Jorge Luis Flores

doi:10.1117/12.944954

24 October 2012 Vectorial shearing interferometer used in defocus detection

Guillermo García-Torales, Jorge Sánchez Preciado, Jorge Luis Flores

Proceedings Volume 8511, Infrared Remote Sensing and Instrumentation XX; 851116 (2012) https://doi.org/10.1117/12.944954
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Bringing the image of a static object to the focus of a system is a relative easy task. However, when the object is being moved, the system has to be adapting some parameters according to the object displacement. For small movements, some detection systems are not able to distinguish the new position of the object. The Vectorial Shearing interferometer (VSI) is able to detect small changes in the position through the measurement of the defocus associated with this displacement. We present a method to detect and asses defocus of a wavefront by using a VSI. We present experimental results.

Citation Download Citation

Guillermo García-Torales, Jorge Sánchez Preciado, and Jorge Luis Flores "Vectorial shearing interferometer used in defocus detection", Proc. SPIE 8511, Infrared Remote Sensing and Instrumentation XX, 851116 (24 October 2012); https://doi.org/10.1117/12.944954

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