Formation and optical properties of amorphous carbon film having embedded nanoparticles deposited by anodic jet carbon arc technique

R. K. Tripathi; O. S. Panwar; Ajay Kesarwani; Sushil Kumar; A. Basu

doi:10.1117/12.927423

15 October 2012 Formation and optical properties of amorphous carbon film having embedded nanoparticles deposited by anodic jet carbon arc technique

R. K. Tripathi, O. S. Panwar, Ajay Kesarwani, Sushil Kumar, A. Basu

Author Affiliations +

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 85492F (2012) https://doi.org/10.1117/12.927423
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

This paper reports the formation and optical properties of amorphous carbon film having embedded nanoparticles deposited by anodic jet carbon arc technique (AJCA). The films deposited have been characterized by x-ray diffraction (XRD), high resolution transmission electron microscope (HRTEM), and scanning electron microscope (SEM) and spectroscopy ellipsometry (SE) measurements. XRD pattern exhibits dominantly an amorphous nature of film. HRTEM investigation shows initially the amorphous structure. However, on closer examination nanoparticles were found to be embedded in the amorphous matrix. The effect of substrate bias and the magnetic field on the optical constants evaluated from SE have been studied. On comparison of deposition condition with and without magnetic field used in growing a-C films there is a change in the values of optical constants.

Citation Download Citation

R. K. Tripathi, O. S. Panwar, Ajay Kesarwani, Sushil Kumar, and A. Basu "Formation and optical properties of amorphous carbon film having embedded nanoparticles deposited by anodic jet carbon arc technique", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85492F (15 October 2012); https://doi.org/10.1117/12.927423

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available