The measurement of optical reflector with complex surface using
nano-CMM

Zhichao Wu; Tong Guo; Jinping Chen; Xing Fu; Xiaotang Hu

doi:10.1117/12.999383

26 November 2012 The measurement of optical reflector with complex surface using nano-CMM

Zhichao Wu, Tong Guo, Jinping Chen, Xing Fu, Xiaotang Hu

Proceedings Volume 8557, Optical Design and Testing V; 85570T (2012) https://doi.org/10.1117/12.999383
Event: Photonics Asia, 2012, Beijing, China

Abstract

Among variety of methods to measure complex surfaces, coordinate measurement is widely used in reverse engineering and measuring complex topography. In this paper, a coordinate measuring system based on 3D tactile probe is introduced. This system can measure complex surface with resolution of 1nm, measuring range of 25mm×25mm×5mm. The component of the measuring system, the principle and advantages of the probe are also introduced as the major part. We used the nano-CMM to test an optical reflector with sine curve surface. The fluctuation of the topography is about 5 micrometers. The result is compared with the data of AFM and the source of deviation is analyzed in the conclusions.

Citation Download Citation

Zhichao Wu, Tong Guo, Jinping Chen, Xing Fu, and Xiaotang Hu "The measurement of optical reflector with complex surface using nano-CMM", Proc. SPIE 8557, Optical Design and Testing V, 85570T (26 November 2012); https://doi.org/10.1117/12.999383

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