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26 November 2012 Aberration retrieval for annular pupils using parametric model of point spread function
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Abstract
In this paper, we propose an aberration retrieval method for annular pupils using proposed parametric model of point spread function (PSF). With this model, the diffraction integral for annular pupils is expressed with Bessel-series representation and annular Zernike coefficients. Conjugate gradient algorithm is used to retrieve aberration coefficients of annular pupil from the corresponding spot intensity images. The iterative calculations of objective function and its gradient function are required for this algorithm. These calculations are accelerated by using the parametric model’s analytical expression instead of Fourier transforms. Numerical simulation and experiment are performed to validate this aberration retrieval method.
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Xinhua Chen and Weimin Shen "Aberration retrieval for annular pupils using parametric model of point spread function", Proc. SPIE 8557, Optical Design and Testing V, 85572D (26 November 2012); https://doi.org/10.1117/12.981977
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