Planar alignment sensor based on Rayleigh interference in two wavelengths

Yao Hu

doi:10.1117/12.999598

26 November 2012 Planar alignment sensor based on Rayleigh interference in two wavelengths

Yao Hu

Proceedings Volume 8557, Optical Design and Testing V; 85572M (2012) https://doi.org/10.1117/12.999598
Event: Photonics Asia, 2012, Beijing, China

Abstract

Precise alignment of planar optical element is common in industry or scientific research. In this paper, a planar alignment sensor based on Rayleigh interference in two wavelengths is proposed. Monochromatic probing lasers in two wavelengths point normally to the two mirror-reflection planes, and the reflective beams carrying alignment information are focused by a lens to form Rayleigh interference patterns at the focal plane. Four-quadrant detectors pick up the patterns and output angular and coplanar adjustment signals according to the rotational-symmetry and axial-symmetry of the pattern. Preliminary experiment demonstrated the feasibility of the method.

Citation Download Citation

Yao Hu "Planar alignment sensor based on Rayleigh interference in two wavelengths", Proc. SPIE 8557, Optical Design and Testing V, 85572M (26 November 2012); https://doi.org/10.1117/12.999598

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available