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26 November 2012 Planar alignment sensor based on Rayleigh interference in two wavelengths
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Abstract
Precise alignment of planar optical element is common in industry or scientific research. In this paper, a planar alignment sensor based on Rayleigh interference in two wavelengths is proposed. Monochromatic probing lasers in two wavelengths point normally to the two mirror-reflection planes, and the reflective beams carrying alignment information are focused by a lens to form Rayleigh interference patterns at the focal plane. Four-quadrant detectors pick up the patterns and output angular and coplanar adjustment signals according to the rotational-symmetry and axial-symmetry of the pattern. Preliminary experiment demonstrated the feasibility of the method.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yao Hu "Planar alignment sensor based on Rayleigh interference in two wavelengths", Proc. SPIE 8557, Optical Design and Testing V, 85572M (26 November 2012); https://doi.org/10.1117/12.999598
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