An approach to compensate the object movement errors in phase shifting profilometry

Lei Lu; Jiangtao Xi; Yanguang Yu; Limei Song

doi:10.1117/12.1000086

20 November 2012 An approach to compensate the object movement errors in phase shifting profilometry

Lei Lu, Jiangtao Xi, Yanguang Yu, Limei Song

Proceedings Volume 8563, Optical Metrology and Inspection for Industrial Applications II; 856304 (2012) https://doi.org/10.1117/12.1000086
Event: Photonics Asia, 2012, Beijing, China

Abstract

Phase shifting profilometry (PSP) technique is widely used as a 3-D shape measurement technique due to its robustness and accuracy. However, PSP requires multiple fringe pattern images to be projected onto an object and a reference plane to calculate the phase value, and also the object must maintain motionless when the measurement is taken. If the object moves during the measurement, significant errors will be introduced when calculating the phase value. This paper analyses the relationship between the object movement and the phase value, and proposes a method for compensating the errors caused by two-dimensional movement of object. This method can eliminate the errors caused by two-dimensional movement of object and reconstruct the object shape successfully. The effectiveness of the proposed method is verified by simulations.

Citation Download Citation

Lei Lu, Jiangtao Xi, Yanguang Yu, and Limei Song "An approach to compensate the object movement errors in phase shifting profilometry", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856304 (20 November 2012); https://doi.org/10.1117/12.1000086

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KEYWORDS

Fringe analysis

Phase shifts

Error analysis

Motion analysis

Phase shifting

3D metrology

Cameras

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