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20 November 2012 Interferometric determination of the silicon sphere diameter using a laser frequency tuning system calibrated by a Fabry-Perot cavity
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Abstract
In order to obtain an accurate Avogadro constant with a relative uncertainty of 1×10-8 to redefine the kilogram, the diameter of a perfect single crystal silicon sphere is required with the measurement uncertainty of 0.3 nm using the X-ray crystal density method. To achieve this, phase-shifting interferometers have been developed. A laser frequency tuning system calibrated by a Fabry-Perot cavity is proposed to improve the laser wavelength and the phase-shift accuracy. The laser frequency standard deviation of the beat frequency is 85 kHz with a gate time of 0.1 s. The gap distances in the diameter determination interferometer are measured based on the laser tuning system, which are 275.3 nm and 110.5 nm, respectively.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuejian Wu, Jitao Zhang, Haoyun Wei, and Yan Li "Interferometric determination of the silicon sphere diameter using a laser frequency tuning system calibrated by a Fabry-Perot cavity", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85631G (20 November 2012); https://doi.org/10.1117/12.982012
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