Low loss optical modulator based on slot-loaded waveguide for unmodified CMOS process

Wei Tan; Qifeng Long; Zhijuan Tu; Xingjun Wang; Huaxiang Yi; Zhiping Zhou

doi:10.1117/12.2001228

20 November 2012 Low loss optical modulator based on slot-loaded waveguide for unmodified CMOS process

Wei Tan, Qifeng Long, Zhijuan Tu, Xingjun Wang, Huaxiang Yi, Zhiping Zhou

Proceedings Volume 8564, Nanophotonics and Micro/Nano Optics; 856424 (2012) https://doi.org/10.1117/12.2001228
Event: Photonics Asia, 2012, Beijing, China

Abstract

We propose a novel optical modulator based on poly-on-silicon slot-loaded waveguide to fit the CMOS process and it demonstrated a large loss reduction from 54.2dB/cm to 22.9dB/cm numerically compared with strip-loaded waveguide structure.

Citation Download Citation

Wei Tan, Qifeng Long, Zhijuan Tu, Xingjun Wang, Huaxiang Yi, and Zhiping Zhou "Low loss optical modulator based on slot-loaded waveguide for unmodified CMOS process", Proc. SPIE 8564, Nanophotonics and Micro/Nano Optics, 856424 (20 November 2012); https://doi.org/10.1117/12.2001228

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