Silicon-based monolithically integrated whispering-gallery mode resonators

Fernando Ramiro-Manzano; Mher Ghulinyan; Nikola Prtljaga; Georg Pucker; Lorenzo Pavesi

doi:10.1117/12.2002387

22 February 2013 Silicon-based monolithically integrated whispering-gallery mode resonators

Fernando Ramiro-Manzano, Mher Ghulinyan, Nikola Prtljaga, Georg Pucker, Lorenzo Pavesi

Proceedings Volume 8600, Laser Resonators, Microresonators, and Beam Control XV; 86001G (2013) https://doi.org/10.1117/12.2002387
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

We report on the realization and characterization of a silicon-based integrated optical platform which implements a vertical coupling scheme between a Whispering-gallery type microresonator and a buried dielectric waveguide. The vertical coupling allows for the separation of the resonator and the waveguide into different planes, which enables the realization of the optical components in different materials/thicknesses. The high optical quality of this micro-optical system follows from the accurate planarization of the waveguide topography, which is achieved by multiple depositions-and-reflows of a borophosphosilicate glass over strip waveguides. Importantly, we demonstrate the feasibility of our approach for wafer-scale mass fabrication of freestanding planar resonators suspended in air and coupled to integrated bus waveguides. This opens the door for the realization of stable all-integrated resonator systems and it has the potential to substitute todays complicated fiber-taper coupling schemes.

Citation Download Citation

Fernando Ramiro-Manzano, Mher Ghulinyan, Nikola Prtljaga, Georg Pucker, and Lorenzo Pavesi "Silicon-based monolithically integrated whispering-gallery mode resonators", Proc. SPIE 8600, Laser Resonators, Microresonators, and Beam Control XV, 86001G (22 February 2013); https://doi.org/10.1117/12.2002387

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available