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13 March 2013 Front Matter: Volume 8616
Proceedings Volume 8616, MOEMS and Miniaturized Systems XII; 861601 (2013) https://doi.org/10.1117/12.2022906
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8616, including the Title Page, Copyright information, Table of Contents, and Conference Committee listing.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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"Front Matter: Volume 8616", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 861601 (13 March 2013); https://doi.org/10.1117/12.2022906
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KEYWORDS
Microopto electromechanical systems
Microelectromechanical systems
Microlens
Microsystems
Mirrors
Photonics
3D scanning
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