A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator

Feng Tian; Guangya Zhou; Fook Siong Chau; Jie Deng; Ramam Akkipeddi; Xiaosong Tang; Siew Lang Teo; Yee Cheong Loke

doi:10.1117/12.2005606

13 March 2013 A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator

Feng Tian, Guangya Zhou, Fook Siong Chau, Jie Deng, Ramam Akkipeddi, Xiaosong Tang, Siew Lang Teo, Yee Cheong Loke

Proceedings Volume 8616, MOEMS and Miniaturized Systems XII; 86160Q (2013) https://doi.org/10.1117/12.2005606
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

In this paper, we demonstrate a novel split-ladder photonic crystal cavity, which can be tuned across a very large wavelength range by an on-chip integrated nano-electromechanical actuator. The nano-electromechanical actuator is used to control the cavity’s central gap. When the cavity gap is widened, the resonance wavelength is blue-shifted correspondingly. The dimensions of the proposed split-ladder cavity are designed by 3D Finite-difference time-domain (FDTD) calculations. We fabricated and tested the devices. Experimental results show that the optomechanical coupling coefficient of the second order resonance mode is about 80 GHz/nm. In addition, there is a relatively linear relationship between the resonance shift and the gap change. The maximum measured resonance wavelength shift is about 17 nm, corresponding to a cavity central gap increase of 26 nm.

Citation Download Citation

Feng Tian, Guangya Zhou, Fook Siong Chau, Jie Deng, Ramam Akkipeddi, Xiaosong Tang, Siew Lang Teo, and Yee Cheong Loke "A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160Q (13 March 2013); https://doi.org/10.1117/12.2005606

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