Closed-loop control driver for quasi-static MOEMS mirrors

A. Tortschanoff; D. Holzmann; M. Lenzhofer; T. Sandner; A. Kenda

doi:10.1117/12.2004167

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13 March 2013 Closed-loop control driver for quasi-static MOEMS mirrors

A. Tortschanoff, D. Holzmann, M. Lenzhofer, T. Sandner, A. Kenda

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Proceedings Volume 8616, MOEMS and Miniaturized Systems XII; 861619 (2013) https://doi.org/10.1117/12.2004167
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

In this paper we present a driver for accurate positioning of certain electrostatically driven micro-opto-electromechanical system (MOEMS) based scanner mirrors. The driver unit can control up to six quasi-static mirror axes using closed loop control. The electronics are described in this contribution together with different closed-loop control algorithms, which were implemented for fast and accurate positioning. Results from closed loop operation are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operating bandwidth can be improved by a factor of up 40.

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A. Tortschanoff, D. Holzmann, M. Lenzhofer, T. Sandner, and A. Kenda "Closed-loop control driver for quasi-static MOEMS mirrors", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 861619 (13 March 2013); https://doi.org/10.1117/12.2004167

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