Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Mohammad J. Moghimi; Chris Wilson; David L. Dickensheets

doi:10.1117/12.2008440

5 March 2013 Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Mohammad J. Moghimi, Chris Wilson, David L. Dickensheets

Proceedings Volume 8617, MEMS Adaptive Optics VII; 861707 (2013) https://doi.org/10.1117/12.2008440
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

A MEMS deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror, while direct electrostatic actuation creates a concave surface. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process and results are presented.

Citation Download Citation

Mohammad J. Moghimi, Chris Wilson, and David L. Dickensheets "Electrostatic-pneumatic membrane mirror with positive or negative variable optical power", Proc. SPIE 8617, MEMS Adaptive Optics VII, 861707 (5 March 2013); https://doi.org/10.1117/12.2008440

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