Free-standing monolithic LiNbO^3  photonic crystal slabs

Jun Deng; Sudheer Kumar Vanga; Sajid Hussian; Hongwei Gao; Soon Thor Lim; Ching Eng Png; Xiang Ning; Andrew A. Bettiol; Aaron J. Danner

doi:10.1117/12.2004085

21 February 2013 Free-standing monolithic LiNbO₃ photonic crystal slabs

Jun Deng, Sudheer Kumar Vanga, Sajid Hussian, Hongwei Gao, Soon Thor Lim, Ching Eng Png, Xiang Ning, Andrew A. Bettiol, Aaron J. Danner

Author Affiliations +

Proceedings Volume 8632, Photonic and Phononic Properties of Engineered Nanostructures III; 86320H (2013) https://doi.org/10.1117/12.2004085
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

In this work, we demonstrate a monolithic approach to fabricate free-standing LiNbO₃ photonic crystal (PhC) slabs. Ion implantation is first applied to form a buried lattice-damage layer at a specified depth in bulk LiNbO₃. Photonic crystal slabs are then made with FIB milling followed by wet etching. A high etching rate of 100 nm/min for the implanted layer has been obtained. A vertical PhC profile has been achieved because the bottoms of the milled cones were truncated by an air gap, with a measured slope angle of the hole sidewalls at 89°. Numerical simulation and free-space illumination measurements of the reflectance spectrum over a broadband wavelength were performed to analyse the properties of various PhC slabs. The free-standing LiNbO₃ structures make them easily incorporated into MEMS and show potential applications for tunable optical filters, sensors, and quantum optics applications where high quality, single crystal LiNbO₃ is needed.

Citation Download Citation

Jun Deng, Sudheer Kumar Vanga, Sajid Hussian, Hongwei Gao, Soon Thor Lim, Ching Eng Png, Xiang Ning, Andrew A. Bettiol, and Aaron J. Danner "Free-standing monolithic LiNbO₃ photonic crystal slabs", Proc. SPIE 8632, Photonic and Phononic Properties of Engineered Nanostructures III, 86320H (21 February 2013); https://doi.org/10.1117/12.2004085

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