Lab-scale EUV nano-imaging employing a gas-puff-target source: image quality versus plasma radiation characteristics

Przemyslaw Wachulak; Andrzej Bartnik; Henryk Fiedorowicz

doi:10.1117/12.2006090

11 December 2012 Lab-scale EUV nano-imaging employing a gas-puff-target source: image quality versus plasma radiation characteristics

Przemyslaw Wachulak, Andrzej Bartnik, Henryk Fiedorowicz

Author Affiliations +

Proceedings Volume 8678, Short-Wavelength Imaging and Spectroscopy Sources; 867807 (2012) https://doi.org/10.1117/12.2006090
Event: Short-Wavelength Imaging and Spectroscopy, 2012, Bern, Switzerland

Abstract

In this chapter we report a desk-top microscopy reaching 50nm spatial resolution in very compact setup using a gas-puff laser plasma EUV source. We present the study of source bandwidth influence on the extreme ultraviolet (EUV) microscope spatial resolution. EUV images of object obtained by illumination with variable bandwidth EUV radiation were compared in terms of knife-edge spatial resolution to study the wide bandwidth parasitic influence on spatial resolution in the EUV microscopy.

Citation Download Citation

Przemyslaw Wachulak, Andrzej Bartnik, and Henryk Fiedorowicz "Lab-scale EUV nano-imaging employing a gas-puff-target source: image quality versus plasma radiation characteristics", Proc. SPIE 8678, Short-Wavelength Imaging and Spectroscopy Sources, 867807 (11 December 2012); https://doi.org/10.1117/12.2006090

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available