Fast simulation method for parameter reconstruction in optical metrology

Sven Burger; Lin Zschiedrich; Jan Pomplun; Frank Schmidt; Bernd Bodermann

doi:10.1117/12.2011154

10 April 2013 Fast simulation method for parameter reconstruction in optical metrology

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Bernd Bodermann

Proceedings Volume 8681, Metrology, Inspection, and Process Control for Microlithography XXVII; 868119 (2013) https://doi.org/10.1117/12.2011154
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications.

Citation Download Citation

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, and Bernd Bodermann "Fast simulation method for parameter reconstruction in optical metrology", Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 868119 (10 April 2013); https://doi.org/10.1117/12.2011154

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