Scatterometry simulator development with GPU, real-coded GA and RCWA

Hirokimi Shirasaki

doi:10.1117/12.2011289

10 April 2013 Scatterometry simulator development with GPU, real-coded GA and RCWA

Hirokimi Shirasaki

Author Affiliations +

Proceedings Volume 8681, Metrology, Inspection, and Process Control for Microlithography XXVII; 86811B (2013) https://doi.org/10.1117/12.2011289
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

In this paper, we show the 2D and 3D scatterometry simulation software which has spectroscopy calculation and optimization algorithm systems. The scatterometry analysis for 3D-structure requires a lot of memory and along calculation time. The calculation is sped up by parallel computing using the GPU (Graphics Processor Unit). Here, we use the programming language CUDA (Compute Unified Device Architecture) and CULA (CULApack) for the NVIDIA GPU. Then, we use the real-coded GA (RCGA) to increase the population, to make a more sensitive solution and to get better fitting groove figures. The scatterometry characteristic is examined by choosing the n-th power cosine type period groove.

Citation Download Citation

Hirokimi Shirasaki "Scatterometry simulator development with GPU, real-coded GA and RCWA", Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 86811B (10 April 2013); https://doi.org/10.1117/12.2011289

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