Combining physical resist modeling and self-consistent field theory for pattern simulation in directed self-assembly

Michael Reilly; Valeriy Ginzburg; Mark D. Smith

doi:10.1117/12.2011639

29 March 2013 Combining physical resist modeling and self-consistent field theory for pattern simulation in directed self-assembly

Michael Reilly, Valeriy Ginzburg, Mark D. Smith

Author Affiliations +

Proceedings Volume 8682, Advances in Resist Materials and Processing Technology XXX; 86820G (2013) https://doi.org/10.1117/12.2011639
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

In this presentation, we describe multi-scale modeling method combining PROLITH lithography simulation with Self-Consistent Field Theory (SCFT) computation of the block copolymer Directed Self-Assembly (DSA). Within this method, we utilize PROLITH to predict the shape of a lithographic feature as function of process conditions. The results of that calculation are then used as input into SCFT simulation to predict the distribution of the matrix and etchable blocks of the DSA polymers (such as PS-b-PDMS or PS-b- PMMA) inside that feature. This method is applied to simple cases (e.g., rectangular trench and cylindrical contact hole), and the self-assembly of various polymers is investigated as a function of their compositions. The new tool could therefore be applied to rapidly design and screen lithographic process conditions together with polymers used to shrink or rectify the features within the DSA technology.

Citation Download Citation

Michael Reilly, Valeriy Ginzburg, and Mark D. Smith "Combining physical resist modeling and self-consistent field theory for pattern simulation in directed self-assembly", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86820G (29 March 2013); https://doi.org/10.1117/12.2011639

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available