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29 March 2013 Design for manufacturability: a fabless perspective
Jason P. Cain
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Proceedings Volume 8684, Design for Manufacturability through Design-Process Integration VII; 868403 (2013) https://doi.org/10.1117/12.2015173
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States
Abstract
Design for manufacturability (DFM) has become a key enabler of integrated circuit (IC) production over the past decade. In this paper a comprehensive DFM program for IC designs at the 28nm node and beyond is described from the perspective of a fabless design company. Challenges for future technology nodes are also explored.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Jason P. Cain "Design for manufacturability: a fabless perspective", Proc. SPIE 8684, Design for Manufacturability through Design-Process Integration VII, 868403 (29 March 2013); https://doi.org/10.1117/12.2015173
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Cited by 13 scholarly publications.
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KEYWORDS
Design for manufacturing
Manufacturing
Design for manufacturability
Metals
System on a chip
Neodymium
Photomasks
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