Characterization of silicon etching in synchronized pulsed plasma

M. Darnon; M. Haass; G. Cunge; O. Joubert; S. Banna

doi:10.1117/12.2011462

29 March 2013 Characterization of silicon etching in synchronized pulsed plasma

M. Darnon, M. Haass, G. Cunge, O. Joubert, S. Banna

Proceedings Volume 8685, Advanced Etch Technology for Nanopatterning II; 86850J (2013) https://doi.org/10.1117/12.2011462
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Pulsed plasmas have been proposed many years ago by research labs and have shown a great potential for etch process improvement. Nevertheless, they have been introduced in manufacturing only recently and the exact characteristics of pulsed plasmas in industrial scale reactors are hardly known. In this paper, we have characterized silicon etching in pulsed HBr/O₂ plasmas using advanced plasma diagnostics (mass spectrometry and ion flux probe) in a 300 mm industrial reactor. We show that pulsing the plasma at low duty cycle reduces the gas molecules dissociation and plasma temperature, as well as the flux of energetic ions to the wafer. The ions during silicon etching are mostly silicon-containing ions that are heavier at low duty cycle. Silicon patterns etched using pulsed plasmas present improved profiles, which is attributed to more uniform passivation layers at low duty cycle.

Citation Download Citation

M. Darnon, M. Haass, G. Cunge, O. Joubert, and S. Banna "Characterization of silicon etching in synchronized pulsed plasma", Proc. SPIE 8685, Advanced Etch Technology for Nanopatterning II, 86850J (29 March 2013); https://doi.org/10.1117/12.2011462

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available