Paper
22 January 2013 Passive metamaterial structures manufactured in the laser processing
Author Affiliations +
Proceedings Volume 8703, Laser Technology 2012: Applications of Lasers; 87030L (2013) https://doi.org/10.1117/12.2014602
Event: Tenth Symposium on Laser Technology, 2012, Szczecin, Poland
Abstract
This paper presents another technique of manufacturing the unit cells of spiral-shaped resonators - SR on the aluminium nitride (AlN) ceramics. In this technique the AlN plane surface is irradiated by the Nd:YAG (1.06 μm). As a result of the supplied energy, the rupture of aluminium and nitrogen bonds occurs. Consequently, on the dielectric surface the conductive aluminium "paths" are formed. Obtaining the low-ohm conductive structures allows deploying this method to manufacture SR structures which can be used in antennas in order to reduce their coupling. An advantage of the demonstrated method is a possibility of selective and direct metallization of the AlN ceramics surface without a mask as it is required in photolithography process, which greatly reduces the implementation time of the projected metamaterials structures.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paweł E. Koziol, Arkadiusz J. Antonczak, Maciej R. Nowak, Przemyslaw A. Gorski, and Krzysztof M. Abramski "Passive metamaterial structures manufactured in the laser processing", Proc. SPIE 8703, Laser Technology 2012: Applications of Lasers, 87030L (22 January 2013); https://doi.org/10.1117/12.2014602
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KEYWORDS
Aluminum nitride

Antennas

Metamaterials

Manufacturing

Ceramics

Aluminum

Resistance

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