Paper
11 June 2013 IR CMOS: infrared enhanced silicon imaging
M. U. Pralle, J. E. Carey, Homayoon Haddad, C. Vineis, J. Sickler, X. Li, J. Jiang, F. Sahebi, C. Palsule, J. McKee
Author Affiliations +
Abstract
SiOnyx has developed visible and infrared CMOS image sensors leveraging a proprietary ultrafast laser semiconductor process technology. This technology demonstrates 10 fold improvements in infrared sensitivity over incumbent imaging technology while maintaining complete compatibility with standard CMOS image sensor process flows. Furthermore, these sensitivity enhancements are achieved on a focal plane with state of the art noise performance of 2 electrons/pixel. By capturing light in the visible regime as well as infrared light from the night glow, this sensor technology provides imaging in daytime through twilight and into nighttime conditions. The measured 10x quantum efficiency at the critical 1064 nm laser node enables see spot imaging capabilities in a variety of ambient conditions. The spectral sensitivity is from 400 to 1200 nm.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. U. Pralle, J. E. Carey, Homayoon Haddad, C. Vineis, J. Sickler, X. Li, J. Jiang, F. Sahebi, C. Palsule, and J. McKee "IR CMOS: infrared enhanced silicon imaging", Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 870407 (11 June 2013); https://doi.org/10.1117/12.2015959
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Cited by 3 scholarly publications.
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KEYWORDS
Silicon

Sensors

Infrared radiation

Infrared imaging

CMOS sensors

Visible radiation

Charge-coupled devices

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