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6 June 2013 Patterning and hardening of gold black infrared absorber by shadow mask deposition with ethyl cyanoacrylate
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Abstract
Patterning of gold-black infrared absorbing films by stencil lithography and hardening by polymer infusion is reported. Gold black nano-structured films are deposited through a thin metal shadow mask in a thermal evaporator in ~400 mTorr pressure of inert gas, followed by ethyl cyanoacrylate fuming through the same mask to produce rugged IR absorptive patterns of ~100 micron scale dimensions. Infrared absorptivity is determined by transmission and reflectivity measurements using a Fourier spectrometer and infrared microscope. Results indicate that the optimized hardening process reduces the usual degradation of the absorptivity with age. This work has potential application to infrared array bolometers.
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Deep Panjwani, Nima Nader-Esfahani, Doug Maukonen, Imen Rezadad, Javaneh Boroumand, Evan Smith, Janardan Nath, and R. E. Peale "Patterning and hardening of gold black infrared absorber by shadow mask deposition with ethyl cyanoacrylate", Proc. SPIE 8708, Window and Dome Technologies and Materials XIII, 870817 (6 June 2013); https://doi.org/10.1117/12.2018082
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