Antenna-coupled uncooled Nb5N6 microbolometers for terahertz imaging

X. C. Tu; Q. K. Mao; L. Xu; C. Wan; Z. L. Sun; L. Kang; J. Chen; P. H. Wu

doi:10.1117/12.2014414

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31 May 2013 Antenna-coupled uncooled Nb₅N₆ microbolometers for terahertz imaging

X. C. Tu, Q. K. Mao, L. Xu, C. Wan, Z. L. Sun, L. Kang, J. Chen, P. H. Wu

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Proceedings Volume 8716, Terahertz Physics, Devices, and Systems VII: Advanced Applications in Industry and Defense; 871605 (2013) https://doi.org/10.1117/12.2014414
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

In recent years our team has done a lot of work toward the goal of sensitive, inexpensive detectors for terahertz detection. In this paper we describe simple fabrication steps and the characterizations of uncooled Nb₅N₆ microbolometers for terahertz imaging. The best dc responsivity of the Nb₅N₆ microbolometer is –760 V/W at the bias current of 0.19 mA. A typical noise voltage as low as 10 nV/Hz^1/2 yields a low noise equivalent power (NEP) of 1.3×10^-11 W/Hz^1/2 at a modulation frequency above 4 kHz. We constructed a quasi-optical type receiver by attaching this uncooled Nb₅N₆ microbolometer to the hyperhemispherical silicon lens. Subsequently, the imaging experiment is performed using this Nb₅N₆ microbolometer receiver at a THz imaging system.

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X. C. Tu, Q. K. Mao, L. Xu, C. Wan, Z. L. Sun, L. Kang, J. Chen, and P. H. Wu "Antenna-coupled uncooled Nb₅N₆ microbolometers for terahertz imaging", Proc. SPIE 8716, Terahertz Physics, Devices, and Systems VII: Advanced Applications in Industry and Defense, 871605 (31 May 2013); https://doi.org/10.1117/12.2014414

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