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31 January 2013 Error analysis and method of calibration for linear time grating displacement sensor
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Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87594A (2013) https://doi.org/10.1117/12.2014435
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China
Abstract
A combination method for calibrating the errors of linear time grating displacement sensor is presented. Based on further analysis of time grating, periodic errors, Abbe errors and thermal expansion errors are integrated to obtain error curve for setting up error model, which is adopted to compensate errors using Fourier harmonic analysis and the principle of liner expansion, respectively. Results prove that this method solves the difficult issues about error separation in the linear measurement, and significantly improves the accuracy of linear time grating. Furthermore, this method also solves the issues about continuous automatic sampling with computer, so that the calibration efficiency has been greatly enhanced.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhonghua Gao, Fangyan Zheng, Xihou Chen, Ziran Chen, and Donglin Peng "Error analysis and method of calibration for linear time grating displacement sensor", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87594A (31 January 2013); https://doi.org/10.1117/12.2014435
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