Long range metrological atomic force microscope with versatile measuring head

Mingzhen Lu; Sitian Gao; Qi Li; Wei Li; Yushu Shi; Xingfu Tao

doi:10.1117/12.2014870

31 January 2013 Long range metrological atomic force microscope with versatile measuring head

Mingzhen Lu, Sitian Gao, Qi Li, Wei Li, Yushu Shi, Xingfu Tao

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87594Y (2013) https://doi.org/10.1117/12.2014870
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

A long range metrological atomic force microscope (AFM) has been developed at NIM. It aims to realize a maximum measurement volume of 50mm×50mm×2mm with an uncertainty of a few tens of nanometers in the whole range. In compliance with Abbe Principle, the instrument is designed as a sample-scanning type. The sample is moved by a 6-DOF piezostage in combination with a hybrid slide-air bearing stage for long scanning range. Homodyne interferometers with four passes attached to a metrological frame measure relative displacement between the probe and sample thus the instrument is directly traceable to the SI. An AFM head is developed as the measuring head for the instrument. Considering accuracy and dynamic performance of the instrument, it is designed to be capable of scanning perpendicularly in a range of 5μm×5μm×5μm with a 3-DOF piezostage. Optical beam deflection method is used and a minimum of components are mounted on the moving part. A novel design is devised so that the photodetector is only sensitive to the deflection of cantilever, but not the displacement of the head. Moving manner of the head varies with scanning range and mode of the instrument. Results of different measurements are demonstrated, showing the excellent performance of the instrument.

Citation Download Citation

Mingzhen Lu, Sitian Gao, Qi Li, Wei Li, Yushu Shi, and Xingfu Tao "Long range metrological atomic force microscope with versatile measuring head", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87594Y (31 January 2013); https://doi.org/10.1117/12.2014870

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