Measurement verification of line smoothness and surface roughness of micro products fabricated by two-photon polymerization

Tien-Tung Chung; Chia- Ping Hung; Chang-Li Tseng; Chin-Te Lin; Patrice L. Baldeck

doi:10.1117/12.2018227

31 January 2013 Measurement verification of line smoothness and surface roughness of micro products fabricated by two-photon polymerization

Tien-Tung Chung, Chia- Ping Hung, Chang-Li Tseng, Chin-Te Lin, Patrice L. Baldeck

Author Affiliations +

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87595A (2013) https://doi.org/10.1117/12.2018227
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

This paper studies the quality of lines and surfaces fabricated by the two-photon polymerization (TPP) technology. Micro lines and surfaces fabricated by TPP are accumulation of micro spots, and their external shapes can be simulated and predicted from manufacturing parameters, such as laser power, exposure time, scanning speed, spot gap, and line gap. The correctness of predicted shapes is verified by measuring product shapes by SEM and AFM. The purpose of this study is to find the best parameters for increasing line smoothness and reducing surface roughness. Firstly, the total energy absorbed in each point within the work piece space is simulated by adding up all the laser spots of the scanning path. The point with absorbed exposure energy exceeding the resin threshold energy forms a polymerized spot of the product, and the product shape can be obtained. Secondly, micro lines and surfaces with different manufacturing parameters are fabricated and product shapes are measured by both SEM and AFM. The simulated shape and the measured shape of the product with specific manufacturing parameters are compared. Shapes from simulation and fabrication have the same trend. Results of this study can be applied in manufacturing TPP products with complex shapes for better surface quality.

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Tien-Tung Chung, Chia- Ping Hung, Chang-Li Tseng, Chin-Te Lin, and Patrice L. Baldeck "Measurement verification of line smoothness and surface roughness of micro products fabricated by two-photon polymerization", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87595A (31 January 2013); https://doi.org/10.1117/12.2018227

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KEYWORDS

Manufacturing

Surface roughness

Atomic force microscopy

Optical simulations

Scanning electron microscopy

Radium

Two photon polymerization

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