Electrically conductive Pt-Rh/ZrO2 and Pt-Rh/HfO2 nanocomposite electrodes for high temperature harsh environment sensors

Scott C. Moulzolf; David J. Frankel; Mauricio Pereira da Cunha; Robert J. Lad

doi:10.1117/12.2017596

17 May 2013 Electrically conductive Pt-Rh/ZrO₂ and Pt-Rh/HfO₂ nanocomposite electrodes for high temperature harsh environment sensors

Scott C. Moulzolf, David J. Frankel, Mauricio Pereira da Cunha, Robert J. Lad

Author Affiliations +

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87630F (2013) https://doi.org/10.1117/12.2017596
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

Nanocomposite films comprised of either Pt-Rh/ZrO₂ or Pt-Rh/HfO₂ materials were co-deposited using multiple e-beam evaporation sources onto langasite (La₃Ga₅SiO₁₄) substrates, both as blanket films and patterned interdigital transducer electrodes for surface acoustic wave (SAW) sensor devices. The films and devices were tested after different thermal treatments in a tube furnace up to 1200°C. X-ray diffraction and electron microscopy results indicate that Pt-Rh/HfO₂ films are stabilized by the formation of monoclinic HfO₂ precipitates after high temperature exposure, which act as pinning sites to retard grain growth and prevent agglomeration of the conductive cubic Pt-Rh phase. The Pt-Rh/ZrO₂ films were found to be slightly less stable, and contain both tetragonal and monoclinic ZrO₂ precipitates that also help prevent Pt-Rh agglomeration. Film conductivities were measured versus temperature for Pt-Rh/HfO₂ films on a variety of substrates, and it was concluded that La and/or Ga diffusion from the langasite substrate into the nanocomposite films is detrimental to film stability. An Al₂O₃ diffusion barrier grown on langasite using atomic layer deposition (ALD) was found to be effective in minimizing interdiffusion between the nanocomposite film and the langasite crystal.

Citation Download Citation

Scott C. Moulzolf, David J. Frankel, Mauricio Pereira da Cunha, and Robert J. Lad "Electrically conductive Pt-Rh/ZrO₂ and Pt-Rh/HfO₂ nanocomposite electrodes for high temperature harsh environment sensors", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630F (17 May 2013); https://doi.org/10.1117/12.2017596

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available