Optical position feedback of quasi-static 2D MOEMS mirrors

A. Tortschanoff; M. Baumgart; D. Holzmann; M. Lenzhofer; T. Sandner; A. Kenda

doi:10.1117/12.2016852

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17 May 2013 Optical position feedback of quasi-static 2D MOEMS mirrors

A. Tortschanoff, M. Baumgart, D. Holzmann, M. Lenzhofer, T. Sandner, A. Kenda

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Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87630J (2013) https://doi.org/10.1117/12.2016852
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

Recently, we have realized a new position sensing device for MOEMS mirrors applicable to arbitrary trajectories, which is based on the measurement of a reflected light beam with a quadrant diode. In this work we present the characteristics of this device, showing first experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.

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A. Tortschanoff, M. Baumgart, D. Holzmann, M. Lenzhofer, T. Sandner, and A. Kenda "Optical position feedback of quasi-static 2D MOEMS mirrors", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630J (17 May 2013); https://doi.org/10.1117/12.2016852

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