Influence of fluid-structure interaction on microcantilever vibrations: applications to rheological fluid measurement and chemical detection

I. Dufour; E. Lemaire; B. Caillard; H. Debéda; C. Lucat; S. M. Heinrich; F. Josse; O. Brand

doi:10.1117/12.2018327

17 May 2013 Influence of fluid-structure interaction on microcantilever vibrations: applications to rheological fluid measurement and chemical detection

I. Dufour, E. Lemaire, B. Caillard, H. Debéda, C. Lucat, S. M. Heinrich, F. Josse, O. Brand

Author Affiliations +

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87630K (2013) https://doi.org/10.1117/12.2018327
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

At the microscale, cantilever vibrations depend not only on the microstructure’s properties and geometry but also on the properties of the surrounding medium. In fact, when a microcantilever vibrates in a fluid, the fluid offers resistance to the motion of the beam. The study of the influence of the hydrodynamic force on the microcantilever’s vibrational spectrum can be used to either (1) optimize the use of microcantilevers for chemical detection in liquid media or (2) extract the mechanical properties of the fluid. The classical method for application (1) in gas is to operate the microcantilever in the dynamic transverse bending mode for chemical detection. However, the performance of microcantilevers excited in this standard out-of-plane dynamic mode drastically decreases in viscous liquid media. When immersed in liquids, in order to limit the decrease of both the resonant frequency and the quality factor, alternative vibration modes that primarily shear the fluid (rather than involving motion normal to the fluid/beam interface) have been studied and tested: these include in-plane vibration modes (lateral bending mode and elongation mode). For application (2), the classical method to measure the rheological properties of fluids is to use a rheometer. To overcome the limitations of this classical method, an alternative method based on the use of silicon microcantilevers is presented. The method, which is based on the use of analytical equations for the hydrodynamic force, permits the measurement of the complex shear modulus of viscoelastic fluids over a wide frequency range.

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I. Dufour, E. Lemaire, B. Caillard, H. Debéda, C. Lucat, S. M. Heinrich, F. Josse, and O. Brand "Influence of fluid-structure interaction on microcantilever vibrations: applications to rheological fluid measurement and chemical detection", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630K (17 May 2013); https://doi.org/10.1117/12.2018327

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KEYWORDS

Microfluidics

Liquids

Fluid dynamics

Chemical detection

Resistance

Data modeling

Silicon

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