Quality factor enhancement for resonant MEMS applying an analogue feedback circuit driven by a lock-in amplifier

Martin Kucera; Franz Hofbauer; Tomás Manzaneque; Victor Ruiz; José Luis Sánchez-Rojas; Achim Bittner; Ulrich Schmid

doi:10.1117/12.2017131

17 May 2013 Quality factor enhancement for resonant MEMS applying an analogue feedback circuit driven by a lock-in amplifier

Martin Kucera, Franz Hofbauer, Tomás Manzaneque, Victor Ruiz, José Luis Sánchez-Rojas, Achim Bittner, Ulrich Schmid

Author Affiliations +

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87630W (2013) https://doi.org/10.1117/12.2017131
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

In this study, an analogue Q-control circuit is presented, based on a digital feedback loop. In this approach, a self-actuated and self-sensing piezoelectric microstructure is used in combination with a lock-in amplifier to extract the Q-control feedback signal amplitude which is proportional to the piezoelectric current. In the next step, the DC-value supported by the lock-in amplifier is multiplied with a sine signal on a custom-designed analogue circuit board containing an analogue amplifier IC. This generated analogue feedback signal allows to drive a complete analogue feedback loop enabling faster response of the Q-control and further faster measurements can be performed. Using this Q-factor enhancement technique, the Q-factor was increased from 397 to about 5357 in air without driving the used Q-control approach to its limits. These promising results will push further activities in measuring the viscosity of liquids in the future.

Citation Download Citation

Martin Kucera, Franz Hofbauer, Tomás Manzaneque, Victor Ruiz, José Luis Sánchez-Rojas, Achim Bittner, and Ulrich Schmid "Quality factor enhancement for resonant MEMS applying an analogue feedback circuit driven by a lock-in amplifier", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630W (17 May 2013); https://doi.org/10.1117/12.2017131

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available