Translator Disclaimer
17 May 2013 All-silicon microforce sensor for bio applications
Author Affiliations +
Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87630Y (2013)
Event: SPIE Microtechnologies, 2013, Grenoble, France
It is well known that for precise biological cell injection the applied forces should be exactly controlled in any specific case. In this paper we present design, prototyping, calibration and testing of a microforce sensor, which fulfils the requirements for injection monitoring of biological cells. It is an axial all-silicon piezoresistive Micro Electro-Mechanical System (MEMS) device. The layout of the all-silicon force sensor is adapted for operation at partial dipping in biochemical solutions. A prototype of this sensor is investigated and its parameters are measured. To verify the applicability of the MEMS for bio-applications, it was used in force monitoring injection of Xenopus Oocyte cells. Force measurements during the injection process and interpretation of the force-penetration curve are presented and discussed. Thus, it has been experimentally proved that the developed all-silicon force sensor can be successfully applied for force monitoring in different bio-applications.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir T. Stavrov, Assen A. Shulev, Chavdar M. Hardalov, Vencislav M. Todorov, and Ilia R. Roussev "All-silicon microforce sensor for bio applications", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630Y (17 May 2013);


MEMS multisensor system for flight testing
Proceedings of SPIE (October 01 2001)
Shear sensitive silicon piezoresistive tactile sensor prototype
Proceedings of SPIE (September 08 1998)
Optical MEMS at Silex Microsystems
Proceedings of SPIE (January 24 2004)
Development of a dual probe Caliper CD AFM for near...
Proceedings of SPIE (July 16 2002)

Back to Top