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17 May 2013 Simulation and optimization of the magnetic field in an electroplated copper micro-coil
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Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87631D (2013) https://doi.org/10.1117/12.2018216
Event: SPIE Microtechnologies, 2013, Grenoble, France
Abstract
This work aims at simulating and optimizing the magnetic field intensity in different electroplated copper micro-coil designs that can be integrated in a recently developed electromagnetic micro-pump. The results of this study will be used in fabricating new optimized micro-coil designs that may enhance the performance of the developed synchronous micro-pump (i.e., the maximum back pressures and flow rates). The synchronous micro-pump concept depends on managing the movement of two magnets in an annular fluidic channel. Magnet rotation is achieved by sequentially activating a set of planar micro-coils to repel or attract the first magnet (traveling magnet) through the channel, while the second one is anchored between the inlet and the outlet ports. At the end of each pumping cycle, the magnets exchange their anchored and traveling functions. To achieve the maximum back pressure and flow rate (highest performance) in such micro-pump, higher magnetic fields without exceeding the material temperature limitation are required. The stronger the magnetic fields that can be generated, the higher the hydraulic power that can the pump deliver. This study presents extensive numerical simulations using the commercial software package COMSOL and presents also optimizations for the effect of the main micro-coil parameters on the generated magnetic field: coil wire width and height, the coil turns offset distance, the effect of including an iron core inside the coil area, and the number of coil turns. The main analyzed results are: the normal magnetic flux contours at the top (upper) surface of the coil - where the permanent magnets rotate in the micro-pump channel -, the distribution of the magnetic field streams and the area averaging of the magnetic field intensity all over the micro-coil sector.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Maher Matar, Alaaldeen T. Al-Halhouli, Stephanus Büttgenbach, and Andreas H. Dietzel "Simulation and optimization of the magnetic field in an electroplated copper micro-coil", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87631D (17 May 2013); https://doi.org/10.1117/12.2018216
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