Modeling, simulation and experimental testing of the MEMS thermoelectric generators in wide range of operational conditions

Z. Ancik; R. Vlach; L. Janak; P. Kopecek; Z. Hadas

doi:10.1117/12.2017134

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17 May 2013 Modeling, simulation and experimental testing of the MEMS thermoelectric generators in wide range of operational conditions

Z. Ancik, R. Vlach, L. Janak, P. Kopecek, Z. Hadas

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Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87631M (2013) https://doi.org/10.1117/12.2017134
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

The aim of this paper is to examine the performances of thermoelectric generator based on microelectromechanical systems technology (MEMS) in wide range of operational conditions. The goal is to evaluate capability of this technology for a development of an independent energy source for aircraft applications. Complex overview of MEMS TEG properties obtained by computational modeling, simulations and experimental testing is utilized to define critical phenomena of MEMS TEG technology.

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Z. Ancik, R. Vlach, L. Janak, P. Kopecek, and Z. Hadas "Modeling, simulation and experimental testing of the MEMS thermoelectric generators in wide range of operational conditions", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87631M (17 May 2013); https://doi.org/10.1117/12.2017134

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