Design and fabrication of a 5 MHz ultrasonic phased array probe with curved transducer

Julia Fischer; Thomas Herzog; Susan Walter; Henning Heuer

doi:10.1117/12.2017004

17 May 2013 Design and fabrication of a 5 MHz ultrasonic phased array probe with curved transducer

Julia Fischer, Thomas Herzog, Susan Walter, Henning Heuer

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87632M (2013) https://doi.org/10.1117/12.2017004
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

A 5 MHz, 16-element phased array concave ultrasonic probe for non-destructive testing has been designed, fabricated and tested. To improve the probes performance its curvature, as opposed to present solutions, was not obtained by adding a corresponding delay wedge, but rather by manufacturing the functional elements (i.e. active material, matching layer) with a curvature. The piezoelectric material used here was a 1-3 composite material made of PZT. The finished probe was tested on a steel half circle with the corresponding radius (100 mm) and on the Olympus PAUT test piece. Good results could be obtained. Three transverse holes with a diameter of 1 mm and a distance of 5 mm to one another could be detected and resolved.

Citation Download Citation

Julia Fischer, Thomas Herzog, Susan Walter, and Henning Heuer "Design and fabrication of a 5 MHz ultrasonic phased array probe with curved transducer", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632M (17 May 2013); https://doi.org/10.1117/12.2017004

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