Simulation of thick film PZT actuators with interdigitated electrodes

Mohanad Mohammed Zaki; Sandy Zähringer; Norbert Schwesinger

doi:10.1117/12.2017411

17 May 2013 Simulation of thick film PZT actuators with interdigitated electrodes

Mohanad Mohammed Zaki, Sandy Zähringer, Norbert Schwesinger

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 876338 (2013) https://doi.org/10.1117/12.2017411
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

This paper deals with the simulation of membrane actuators based on thick film piezoelectric ceramics with interdigitated electrodes using the finite element method. A modified piezoelectric coupling matrix is introduced to account for the piezoelectric non-linearity due to poling and actuation at high electric fields. Electrodes were fabricated on top of 250 μm thick PZT substrates which were characterized. The experimental data verified the simulation results and proved the necessity of the modified coupling matrix.

Citation Download Citation

Mohanad Mohammed Zaki, Sandy Zähringer, and Norbert Schwesinger "Simulation of thick film PZT actuators with interdigitated electrodes", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876338 (17 May 2013); https://doi.org/10.1117/12.2017411

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