Phase-shift in waveguide integrated Ge quantum wells

Jacopo Frigerio; Papichaya Chaisakul; Delphine Marris-Morini; Stefano Cecchi; Mohamed-Said Rouifed; Giovanni Isella; Laurent Vivien

doi:10.1117/12.2017249

22 May 2013 Phase-shift in waveguide integrated Ge quantum wells

Jacopo Frigerio, Papichaya Chaisakul, Delphine Marris-Morini, Stefano Cecchi, Mohamed-Said Rouifed, Giovanni Isella, Laurent Vivien

Author Affiliations +

Proceedings Volume 8767, Integrated Photonics: Materials, Devices, and Applications II; 87670B (2013) https://doi.org/10.1117/12.2017249
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

We report on the electro-refractive effect in Ge/SiGe multiple quantum wells grown by low energy plasma enhanced chemical vapor deposition (LEPECVD). The electro-refractive effect was experimentally characterized by the shift of Fabry-Perot fringes in the transmission spectra of a 64 μm long slab waveguide. A refractive index variation up to 1.3 × 10^-3 was measured with an applied electric field of 88 kV/cm at 1475 nm, 50 meV below the excitonic resonance, with a V_πL_π figure of merit of 0.46 V×cm. The device performances are promising for the realization of Mach Zehnder modulators in the Ge-Si material platform.

Citation Download Citation

Jacopo Frigerio, Papichaya Chaisakul, Delphine Marris-Morini, Stefano Cecchi, Mohamed-Said Rouifed, Giovanni Isella, and Laurent Vivien "Phase-shift in waveguide integrated Ge quantum wells", Proc. SPIE 8767, Integrated Photonics: Materials, Devices, and Applications II, 87670B (22 May 2013); https://doi.org/10.1117/12.2017249

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